Multiple lead probe for integrated circuits in wafer form

Abstract From the Canadian patent

A probe assembly for use in testing an integrated circuit embodied in an integrated circuit chip in wafer form, comprises a stiff support member formed with an aperture, and a membrane. Both the support member and the membrane comprise dielectric material and portions of conductive material supported by the dielectric material in electrically-insulated relationship. The portions of conductive material of the membrane constitute inner contact elements distributed over a main face of the membrane in a pattern that corresponds to the pattern in which contact areas are distributed over the contact face of the chip under test, outer contact elements distributed about a peripheral region of the …