Thin film electrical devices with amorphous carbon electrodes and method of making same

Abstract From the Canadian patent

Thin film electrical structures such as, threshold switching devices and phase change memory cells, preferably utilizing electrically stable relatively inert, conductive electrodes including a non-single-crystal deposited film of carbon material are disclosed. The film of carbon material which, preferably is amorphous and substantially pure is, disposed adjacent to a layer of active material such as an amorphous semiconductor, and serves to prevent undesired degradation of the active material especially when the device is carrying appreciable current in its on-state. A method of making such structures with high quality interfaces between the semiconductor layer and the conductive carbon …