Glow-discharge decomposition apparatus
CA 1269950 C · Owner: Tai, Masahiko · Inventors: Tai, Masahiko; Tawada, Yoshihisa; Nakayama, Takehisa
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
A glow-discharge decomposition apparatus comprising a pair of ground electrodes each suitable for carrying a substrate. An RF-electrode has two portions forming its opposite sides and connected to a RF-power supply, a matching circuit and a controlling circuit having at least one electric element. Each of the two substrates carried by the pair of electrodes is placed over one of the RF-electrode sides in parallel to each other; the RF-electrode sides being in parallel and being electrically insulated from each other. The matching circuit is connected to accept RF-power from the RFpower supply and to divide the RF-power into two the, controlling circuit being connected to accept RF-power …
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Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Granted June 5, 1990. A Canadian patent filed before October 1, 1989 lasted 17 years from grant, so its term ended June 5, 2007.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
Timeline From CIPO dates
Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.