Semi-conductor processing system
CA 1267978 C · Owner: Shimizu Construction Co. Ltd. · Inventors: Iwasawa, Yoshiyuki; Ishida, Tsutomu; Kobayashi, Shintaro
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
A semiconductor processing system which includes: a first semiconductor wafer cassette for housing semiconductor wafers; a first transfer pod for enclosing the first cassette airtightly, the first pod having a box-like pod body with an open bottom and a bottom plate detachably attached to the pod body for closing the bottom of the pod body; a wafer processing equipment having a loading for receiving the cassette and a canopy covering the loading port, the processing equipment processing the wafer in the first cassette when the cassette is received in the loading port; and a first mechanism for transferring the first cassette between the loading port of the processing equipment and the first …
Read the whole patent
Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Granted April 17, 1990. A Canadian patent filed before October 1, 1989 lasted 17 years from grant, so its term ended April 17, 2007.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
Timeline From CIPO dates
Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.