Gas supply device, particularly for manufacturing semiconductor elements

Abstract From the Canadian patent

A device for supplying gases to a perforated vessel, particularly a boat or boats for processing semiconductor elements by their exposure to the gases comprises, at least one tubular perforated gas manifold disposed under the perforated part of the boat and supported on a manifold raiser. The vessel is supported on two cylindrical support members which closely abut the boat and the manifolds which in turn abut the manifold raiser along the working length of the boat and the supporting members. A relatively small gas expansion cavity is thereby created between the manifold(s) and the boat which improves the manufacturing process.