Hybrid organometallic compounds, particularly for metal organic chemical vapor deposition

Abstract From the Canadian patent

Compounds having the molecular formula: MRx, wherein x is an integer from 2 to 4 inclusive each said R, substituent is independently selected from hydride lower alkyl, phenyl, alkyl-substituted phenyl cyclopentadienyl, and alkyl, substituted cyclopentadienyl at least two of said R substituents, are different and M is an element selected from Groups 2B or 3A of the Periodic Table, Bismuth, Selenium Tellurium,Beryllium, and, Magnesium, but excluding Aluminum Bismuth, Selenium, and, Tellurium if any R is hydride. The hybrid compound is used for metal organic chemical vapor deposition. The invention also includes a metal organic chemical vapor deposition process employing a hybrid of first and …