Method and apparatus for evaporation arc stabilization for non-permeable targets utilizing permeable stop ring
CA 1235086 A · Owner: Vac-Tec Systems, Inc. · Inventors: Lefkow, Anthony R.T.
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
Abstract, Apparatus and method for evaporation arc stabilization including a target having a surface of material of non-pereable material to be evaporated; circuitry for establishing an arc on the target surface for evaporating the target material, the arc being characterized by the presence of charged particles and a cathode spot which randomly migrates over the target surface; and a confinement ring surrounding the target surface, the ring being composed of a magnetically permeable material to thereby confine the cathode spot to the target surface.
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Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Granted April 12, 1988. A Canadian patent filed before October 1, 1989 lasted 17 years from grant, so its term ended April 12, 2005.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
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Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.