Mirror wafer of compound semiconductor
CA 1211863 A · Owner: Sumitomo Electric Industries, Ltd. · Inventors: Yamaguchi, Jun
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
Novel mirror wafers of a compound semiconductor crystal are provided herein. The anisotropic patterns naturally appear on the rear surface of such crystals by an etching process using a suitable etchant. This denotes the mesa direction. This invention is especially useful for rectangular or square wafers which do not have orientation flats on their peripheries.
Read the whole patent
Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Granted September 23, 1986. A Canadian patent filed before October 1, 1989 lasted 17 years from grant, so its term ended September 23, 2003.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
Timeline From CIPO dates
Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.