Electron gun assembly
CA 1205120 A · Owner: The Perkin-Elmer Corporation · Inventors: Clayton, Robert H.
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
This invention relates to an electron gun assembly for use, for example, in x-ray lithography which, includes an electron emitter assembly beam forming, elements disposed adjacent the electron emitter assembly a target plane disposed in spaced relationship with respect to the electron emitter assembly a deflector, disposed adjacent the path of the electrons emitted from the electron emitter assembly, a pseudoanode mounted in spaced relationship with respect to the deflector and to the electron emitter assembly and to the target plane said electron emitter assembly being interposed between the pseudoanode and the target plane.
Read the whole patent
Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Granted May 27, 1986. A Canadian patent filed before October 1, 1989 lasted 17 years from grant, so its term ended May 27, 2003.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
Timeline From CIPO dates
Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.