Electrical multilayer contact for microelectronic structure
CA 1189982 A · Owner: International Business Machines Corporation · Inventors: Tu, King-Ning; Eizenberg, Moshe
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
A guided interracial reaction is utilized which is to finish soon and to result in the formation of an equilibrium (or near equilibrium in actual practice) diffusion barrier. Illustratively for, a diffusion barrier between A (e.g. Al) and B (e.g. Si) the exemplary barrier layer in accordance with the principles of this invention is an alloy of MxNy (e.g. Pd20W80) satisfying the following criteria: (1) M is an element which reacts with both A and B to form compounds; and (2) N does not react with either A or B in compound formation in the presence of M. A low mutual solid solubility of M and N is desirable. Thus, N-A, and N-B eutectic systems are suitable for N and M. The composition of the …
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Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Granted July 2, 1985. A Canadian patent filed before October 1, 1989 lasted 17 years from grant, so its term ended July 2, 2002.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
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Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.