Magnetic apparatus for reducing substrate warpage
CA 1189174 A · Owner: Energy Conversion Devices, Inc. · Inventors: Doehler, Joachim; Cannella, Vincent; Gray, Richard O. Jr.
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
An apparatus for producing improved large area photovoltaic devices by substantially reducing the warpage of relatively large area rela-, tively thin webs of magnetic substrate material which travel through a plurality of high temperature, low pressure glow discharge deposition chambers. As the web of the substrate material moves through the deposition chambers, it assumes A normal, elongated path of travel. Due to the elevated deposition temperature; the elongated path of travel, the force of gravity, etc. the web has a tendency to warp. Warpage of the web is undesirable as it promotes the deposition of nonuniform semiconductor alloy layers. The improvement of the present invention …
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Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Granted June 18, 1985. A Canadian patent filed before October 1, 1989 lasted 17 years from grant, so its term ended June 18, 2002.
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Timeline
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Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.