Radiation-sensitive composition containing an azide compound and an iodine compound
CA 1181627 A · Owner: Hitachi, Ltd. · Inventors: Ueno, Takumi; Nonogaki, Saburo; Kohashi, Takahiro
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
The invention relates to a radiation-sensitive composition comprising a polymer and an iodine-containing azide compound, at least a part of which can be fixed substantially in the polymer by exposure to a radiation or a radiation-sensitive composition comprising a polymer an azide compound, and an iodine compound at least a part, of which can be fixed substantially in the polymer by exposure to a radiation. This composition can be subjected to dry development with oxygen plasma after the exposure to radiation followed by heating.
Read the whole patent
Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Granted January 29, 1985. A Canadian patent filed before October 1, 1989 lasted 17 years from grant, so its term ended January 29, 2002.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
Timeline From CIPO dates
Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.