Cylindrical cathode for magnetically-enhanced sputtering
CA 1181362 A · Owner: Battelle Development Corporation · Inventors: Zega, Bogdan
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
In this cylindrical magnetically-enhanced, sputtering cathode, the magnetic field at the cathode target is generated by applying an electric current through a hollow electrical conductor disposed within a tubular target, so that the electric current flowing along this conductor induces circular magnetic lines concentrically around its axis. By biasing negatively the tubular target immersed in a low pressure gas, a glow discharge is generated. Electrons emitted from the target surface are accelerated radially by the electric field, but deviated perpendicularly by the magnetic field. The resulting motion is confined in a spirally-shaped area centered on the conductor axis.
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Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Granted January 22, 1985. A Canadian patent filed before October 1, 1989 lasted 17 years from grant, so its term ended January 22, 2002.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
Timeline From CIPO dates
Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.