Cathodic sputtering apparatus for detecting target piercing
CA 1164409 A · Owner: Battelle Development Corporation · Inventors: Zega, Bogdan
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
The sputtering cathode (10) forming part of the apparatus of the invention essentially comprises a target (20) made of a material to be sputtered, arranged in front of an intermediate support (15) so as to define a first tight chamber (30) of low thickness therebetween, intended to be provided with an atmosphere of a gas (37) presenting a high thermal conductivity (under a pressure substantially higher than that prevailing inside the vacuum chamber of the apparatus). The intermediate support (15) in turn forms part of the wall of a second tight chamber adjoining said first tight chamber, which is intended to be circulated with a liquid coolant therewithin. The above arrangement enables the …
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Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Granted March 27, 1984. A Canadian patent filed before October 1, 1989 lasted 17 years from grant, so its term ended March 27, 2001.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
Timeline From CIPO dates
Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.