Expired Canadian patentCanada
Dry etching of copper patterns
CA 1161787 A · Owner: International Business Machines Corporation · Inventors: Schaible, Paul M.; Schwartz, Geraldine C.
Overview
Drawings and full text
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
Dry Etching of Copper Patterns, Abstract The use of a molybdenum diffusion barrier between a copper layer and a magnesium oxide dry etch mask to obtain and insure adhesion between the two. FI9-80-023
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Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Granted February 7, 1984. A Canadian patent filed before October 1, 1989 lasted 17 years from grant, so its term ended February 7, 2001.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
FiledOctober 29, 1981
GrantedFebruary 7, 1984
Term endedFebruary 7, 2001
Patent numberCA 1161787 A
Classification (IPC)C23F4/00 +2 more
Timeline
Timeline From CIPO dates
Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.