Sealing system for a movable vacuum chamber of a charged particle beam machine

Abstract From the Canadian patent

An improved sealing system for the vacuum chamber of a machine for processing a workpiece with a beam of charged particles is disclosed. The workpiece has an elongate processing zone which is movable relative to the vacuum chamber passing through an entrance section in a sealing zone into the vacuum chamber and exiting therefrom through an exit section of the sealing zone. The sealing zone surrounds a beam exit opening of the vacuum chamber and provides a seal against the workpiece face while permitting relative movement. To improve the seal, the width of the sealing zone is enlarged either at the entrance section or at the exit section or both and various other improvements such as …