Purification of nitrogen trifluoride atmosphere
CA 1104794 A · Owner: Air Products And Chemicals, Inc. · Inventors: Woytek, Andrew J.; Lileck, John T.
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
This invention relates to an improvement in a process for purifying nitrogen frifluoride atmospheres generally contaminated with nitrous oxide, water, and dinitrogen difluoride. The improvement for extending adsorber life resides in reducing the dinitrogen difluoride content in the atmosphere to less than 0.03% by volume prior to passing the atmosphere through the adsorber.
Read the whole patent
Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Granted July 14, 1981. A Canadian patent filed before October 1, 1989 lasted 17 years from grant, so its term ended July 14, 1998.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
Timeline From CIPO dates
Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.