Diffraction type alignment/measurement of configurations on spaced planes
CA 1104338 A · Owner: International Business Machines Corporation · Inventors: Charsky, Ronald S.; Flamholz, Alexander L.
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
Abstract of the Disclosure A system for measuring the lateral displacement between edges located on two spaced apart objects with a precision, in the order of 1 microinch generates and analyses the, diffraction pattern produced by the physical edge of one object and the aerial image of the edge on the other object. The system can be used for the alignment of the objects or the comparison of patterns located on the objects.
Read the whole patent
Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Granted July 7, 1981. A Canadian patent filed before October 1, 1989 lasted 17 years from grant, so its term ended July 7, 1998.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
Timeline From CIPO dates
Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.