Method and apparatus for pattern examination
CA 1102001 A · Owner: Nippon Telegraph And Telephone Public Corporation · Inventors: Kurihara, Kenji; Saito, Kunio; Tsujiyama, Bunjiro
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
A pattern to he examined is scanned to produce binary information of divisional regions of the pattern corresponding to the picture elements of respective scanning lines as parallel information. The parallel information regarding the shape and position of the pattern is concurrently examined under two modes. The second mode includes examination of the vertical edge and the horizontal edge, examination of the vertical and horizontal edges by compensating the deviation of mask setting in the horizontal direction and examination of, the vertical and horizontal edges by compensating the deviation of mask setting in the vertical direction.
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Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Granted May 26, 1981. A Canadian patent filed before October 1, 1989 lasted 17 years from grant, so its term ended May 26, 1998.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
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Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.