Force transducing cantilever beam and pressure transducer incorporating it

Abstract From the Canadian patent

A differential pressure and process pressure transducer includes a semiconductor cantilever beam a diaphragm, a, spacer, and a back plate. The diaphragm spacer, and back, plate, fabricated from glass quartz or silicon, or a, combination of those materials are bonded together at their, peripheries to form a cup. The ends of the beam are bonded, respectively, to the supported periphery of the diaphragm and to an intermediate deflecting portion thereof whereby pressure forces within the cup are transmitted by the diaphragm to the beam. Piezoresistive elements are diffused into the surface of the beam to produce an electric signal in accordance with the strain produced in the beam as the result …