Silicon wafer polishing
CA 1071511 A · Owner: International Business Machines Corporation · Inventors: Basi, Jagtar S.
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
Abstract of the Disclosure The polishing of monocrystalline silicon wafers with an aqueous composition of fine sized abrasive particles, a soluble alkali metal base such as sodium carbonate and an oxidizing agent such as sodium or potassium salt of dichloroisocyanuric acid (e.g. salts of halo-trizenetrione).
Read the whole patent
Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Granted February 12, 1980. A Canadian patent filed before October 1, 1989 lasted 17 years from grant, so its term ended February 12, 1997.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
Timeline From CIPO dates
Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.