Liquid phase epitaxy method and apparatus
CA 1071069 A · Owner: Western Electric Company, Incorporated · Inventors: Logan, Ralph A.; White, Harry G.; Merz, James L.
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
The present invention relates to a liquid phase epitaxy method of fabricating on a substrate a layer having a taper adjacent a zone of uniform thickness. The method comprises the steps of positioning a mask in closely spaced relation over a portion of the substrate and bringing a saturated source solution into contact with the substrate while maintaining a controlled cooling program for a time period which is effective to grow the layer to the desired thickness. The taper is formed adjacent the edges of the mask.
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Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Granted February 5, 1980. A Canadian patent filed before October 1, 1989 lasted 17 years from grant, so its term ended February 5, 1997.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
Timeline From CIPO dates
Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.