Method for producing compound thin films
CA 1066174 A · Owner: Oy Lohja Ab · Inventors: Antson, Jorma; Suntola, Tuomo
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
A method of growing compound thin films of single atomic layers by sequential surface reaction steps between the single elements of the compound and a body surface. The method of the invention comprises subjecting in each reaction step the body surface to interaction with atoms of a single element in vapour phase at a partial pressure sufficiently high and over a period of time sufficiently long to cause collisions on the surface of the single element atoms in excess of the number of atoms in one single atomic layer of the surface, and maintaining the surface at a temperature sufficiently high for the surface reaction to occur and too high for the reacting vapour to condense itself on the …
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Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Granted November 13, 1979. A Canadian patent filed before October 1, 1989 lasted 17 years from grant, so its term ended November 13, 1996.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
Timeline From CIPO dates
Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.