Controlled thickness of dielectric films on conductor edges
CA 1061471 A · Owner: N.V. Philips Gloeilampenfabrieken · Inventors: Willemse, Peter H.M.; Van Santen, Johannes G.; Theunissen, Matthias J.J.
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
The invention relates to a method of manufacturing a charge transfer device in which a semiconductor substrate is provided with a first insulating layer, a first conducting layer and a second insulating layer. In the second insulating layer and in the first conductive layer a firs-t conductor pattern is formed after which the edges of the conductors in the first conductive layer are oxidized in which the second insulating layer on the edges is thinner than of adjoining parts of the second insulating layer. A second conductive layer is then provided in a second pat-tern. - 14 - _ 14 -
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Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Granted August 28, 1979. A Canadian patent filed before October 1, 1989 lasted 17 years from grant, so its term ended August 28, 1996.
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Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.