Method for fabricating minute openings in integrated circuits
CA 1048331 A · Owner: International Business Machines Corporation · Inventors: Magdo, Steven; Magdo, Ingrid E.
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
Abstract of Disclosure A method in the fabrication of integrated circuits for forming small openings through electrically insulative passivating layers on semiconductor surfaces. First and second layers of different insulative material are formed on the semiconductor surface. Then a first slot, extending through the second or top layer is formed by chemical etching through an etch-resistant mask with an etchant which selectively etches the material in the top layer. The top layer is then covered with a photoresist mask having a second slot which crosses the first slot and the structure is subjected to chemical etching through the photoresist mask with an etchant that selectively etches the …
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Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Granted February 13, 1979. A Canadian patent filed before October 1, 1989 lasted 17 years from grant, so its term ended February 13, 1996.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
Timeline From CIPO dates
Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.