A method and an apparatus for generation of a discharge in own vapors of a radio frequency electrode for sustained self-sputtering and evaporation of the electrode

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Listed from its IP Australia record in Patent Yard's archive of Australian patents past their term. Its claims, description and drawings are in the AusPat record and on Google Patents, and the Claude kit works from them.

Why it's free to use

• Filed October 12, 1994 and granted February 5, 1998. An Australian standard patent lasts 20 years from its date of patent, which is at most a year after this filing, so its term ended by October 12, 2015.
• A pharmaceutical extension adds at most five years, so even that would have ended by October 12, 2020.
• We check Australian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.